In-line式
Plasmax – 604A/E
Handler Slot magazine to Slot magazine Quarter-tracks can accommodate four strips in one chamber to clean substrate/lead frame
Plasmax – 602A/E
Handler Slot magazine to Slot magazine. Dual tracks can accommodate two strips in one chamber to clean substrate/lead frame
Plasmax – 601A
Handling 8” wafer with ring for a wafer surface cleaning