Marking Performance

Fonts

SEMI OCR

Mini. Character Height

Bare Si 250um (Option for smaller character)

Accuracy

± 100um

Repeatability

± 25um

WPH

160

Depth of Marking

White marking < 3 um, Dark marking < 1um

Wafer Handling 

Wafer Size

6”,8"

Wafer Thickness

≧250m

Load Port

Open cassette  x 3

Alignment

Optical alignment for both flatted and notched wafers

Workstation

Operator System

English / Chinese

Communication

SECS II / GEM Interface optional